Najafi K, Ji J, Wise K D
Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor 48109.
IEEE Trans Biomed Eng. 1990 Jan;37(1):1-11. doi: 10.1109/10.43605.
This paper describes the scaling limitations of multichannel recording probes fabricated for use in neurophysiology using silicon integrated circuit technologies. Scaled silicon probe substrates 8 microns thick and 16 microns wide can be fabricated using boron etch-stop techniques. Theoretical expressions for calculating the thickness and width of silicon substrates have been derived and agree closely with experimental results. The effects of scaling probe dimensions on its strength and stiffness are described. The probe shank dimensions can be designed to vary the strength and stiffness for different applications. The scaled silicon substrates have a fracture stress of about 2 x 10(10) dyn/cm2, which is about six times that of bulk silicon, and are strong and very flexible. Scaling the feature sizes of recording electrode arrays down to 1 micron is possible with less than 1 percent electrical crosstalk between channels.
本文描述了采用硅集成电路技术制造的用于神经生理学的多通道记录探针的尺寸缩放限制。使用硼蚀刻停止技术可以制造出厚度为8微米、宽度为16微米的缩放硅探针基板。推导了计算硅基板厚度和宽度的理论表达式，其与实验结果密切相符。描述了缩放探针尺寸对其强度和刚度的影响。探针柄的尺寸可以设计成针对不同应用改变强度和刚度。缩放后的硅基板具有约2×10¹⁰达因/平方厘米的断裂应力，约为块状硅的六倍，且坚固且非常柔韧。将记录电极阵列的特征尺寸缩小至1微米是可行的，通道间的电串扰小于1%。
