Slobodskyy T, Schroth P, Grigoriev D, Minkevich A A, Hu D Z, Schaadt D M, Baumbach T
Institute for Synchrotron Radiation, Karlsruhe Institute of Technology-76344 Eggenstein-Leopoldshafen, Germany.
Rev Sci Instrum. 2012 Oct;83(10):105112. doi: 10.1063/1.4759495.
A portable synchrotron molecular beam epitaxy (MBE) system is designed and applied for in situ investigations. The growth chamber is equipped with all the standard MBE components such as effusion cells with shutters, main shutter, cooling shroud, manipulator, reflection high energy electron diffraction setup, and pressure gauges. The characteristic feature of the system is the beryllium windows which are used for in situ x-ray measurements. An UHV sample transfer case allows in vacuo transfer of samples prepared elsewhere. We describe the system design and demonstrate its performance by investigating the annealing process of buried InGaAs self-organized quantum dots.
设计了一种便携式同步加速器分子束外延（MBE）系统并将其应用于原位研究。生长室配备了所有标准的MBE组件，如带快门的蒸发源、主快门、冷却罩、机械手、反射高能电子衍射装置和压力计。该系统的独特之处在于用于原位X射线测量的铍窗。一个超高真空样品传输箱允许在真空中传输在其他地方制备的样品。我们描述了该系统的设计，并通过研究掩埋InGaAs自组织量子点的退火过程来展示其性能。
