Laboratoire de Chimie des Polymères Organiques, Univ. Bordeaux, CNRS, LCPO, UMR 5629, F-33600 Pessac, France.
Adv Mater. 2013 Jan 11;25(2):213-7. doi: 10.1002/adma.201203254. Epub 2012 Nov 22.
We have overcome the cost and time consumption limitations of common lithography techniques used to control the self-assembly of block copolymers into highly ordered 2D arrays through the use of a guiding pattern created from a polymeric sub-layer. The guiding pattern is a sinusoidal surface-relief grating interferometrically inscribed onto an azobenzene containing copolymer sub-layer leading to a defect-free single grain of block copolymer domains.
我们克服了使用常见光刻技术控制嵌段共聚物自组装成高度有序的 2D 阵列时所受到的成本和时间消耗限制,方法是使用由聚合物亚层形成的导向图案。该导向图案是通过干涉光刻技术在含有偶氮苯的共聚物亚层上刻蚀形成的正弦形表面浮雕光栅,从而得到无缺陷的嵌段共聚物畴单颗粒。