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通过直写聚焦电子束诱导沉积合成用于纳米磁逻辑的个体调谐纳米磁铁。

Synthesis of individually tuned nanomagnets for Nanomagnet Logic by direct write focused electron beam induced deposition.

机构信息

Institute for Solid State Electronics, Vienna University of Technology, Floragasse 7/1, A-1040 Vienna, Austria.

出版信息

ACS Nano. 2013 Jan 22;7(1):777-84. doi: 10.1021/nn305079a. Epub 2012 Dec 17.

DOI:10.1021/nn305079a
PMID:23227975
Abstract

Nanomagnet Logic (NML) is a promising new technology for future logic which exploits interactions among magnetic nanoelements in order to encode and compute binary information. This approach overcomes the well-known limits of CMOS-based microelectronics by drastically reducing the power consumption of computational systems and by offering nonvolatility. An actual key challenge is the nanofabrication of such systems that, up to date, are prepared by complex multistep processes in planar technology. Here, we report the single-step synthesis of NML key elements by focused electron beam induced deposition (FEBID) using iron pentacarbonyl as a gas precursor. The resulting nanomagnets feature an inner iron part and a 3 nm iron oxide cover (core-shell structure). Full functionality of conventional NML gates from FEBID-nanowires was achieved. An advanced structure maintaining the gate functionality based on bended nanowires was realized. The unique design obtained by direct-writing reduces the error probability and may merge several NWs in future NML elements.

摘要

纳米磁逻辑(NML)是一种很有前途的未来逻辑技术,它利用磁性纳米元件之间的相互作用来编码和计算二进制信息。这种方法通过大幅降低计算系统的功耗并提供非易失性,克服了基于 CMOS 的微电子学的众所周知的限制。一个实际的关键挑战是这种系统的纳米制造,到目前为止,这些系统是通过平面技术中的复杂多步工艺制备的。在这里,我们报告了使用五羰基铁作为气体前体通过聚焦电子束诱导沉积(FEBID)一步合成 NML 关键元件。得到的纳米磁铁具有内部的铁部分和 3nm 的氧化铁覆盖层(核壳结构)。从 FEBID 纳米线实现了传统 NML 门的全功能。实现了基于弯曲纳米线的保持门功能的先进结构。通过直接写入获得的独特设计降低了错误概率,并可在未来的 NML 元件中合并多个 NW。

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