Winkler Robert, Brugger-Hatzl Michele, Porrati Fabrizio, Kuhness David, Mairhofer Thomas, Seewald Lukas M, Kothleitner Gerald, Huth Michael, Plank Harald, Barth Sven
Christian Doppler Laboratory-DEFINE, Graz University of Technology, 8010 Graz, Austria.
Graz Centre for Electron Microscopy, 8010 Graz, Austria.
Nanomaterials (Basel). 2023 Nov 6;13(21):2907. doi: 10.3390/nano13212907.
Electron-induced fragmentation of the HFeCo(CO) precursor allows direct-write fabrication of 3D nanostructures with metallic contents of up to >95 at %. While microstructure and composition determine the physical and functional properties of focused electron beam-induced deposits, they also provide fundamental insights into the decomposition process of precursors, as elaborated in this study based on EDX and TEM. The results provide solid information suggesting that different dominant fragmentation channels are active in single-spot growth processes for pillar formation. The use of the single source precursor provides a unique insight into high- and low-energy fragmentation channels being active in the same deposit formation process.
电子诱导的HFeCo(CO)前驱体碎片化使得能够直接写入制造金属含量高达>95原子%的三维纳米结构。微观结构和成分决定了聚焦电子束诱导沉积物的物理和功能特性，同时也为前驱体的分解过程提供了基本见解，正如本研究基于能量色散X射线光谱（EDX）和透射电子显微镜（TEM）所阐述的那样。结果提供了确凿的信息，表明在柱体形成的单点生长过程中有不同的主导碎片化通道活跃。使用单源前驱体为在同一沉积物形成过程中活跃的高能和低能碎片化通道提供了独特的见解。
