Univ-Lille Nord de France, Ecole des Mines de Douai, 941, rue Charles Bourseul BP 10838, 59500 Douai, France.
Micron. 2013 Jan;44:107-14. doi: 10.1016/j.micron.2012.05.004. Epub 2012 May 30.
A new approach has been initiated to improve the spatial lateral resolution of the X-ray microanalysis and the backscattered electrons modes in variable pressure or environmental scanning electron microscope (VP-ESEM). This approach is based on correlation between two concepts: the electron beam skirt radius in the gas (R(S)) and the generation volume radius (R(X)) of X-ray signals and the generation volume radius (R(BSE)) of backscattered electrons in the material. In order to follow the relationship between R(S), R(X) and R(BSE), PMMA polymer, silicon oxide and aluminium are used. The results of the simulation show the existence of the best lateral resolution conditions named R (P, E) depending on the pressure and the energy for each material. This approach will enable us to propose some optimal experimental conditions to characterize different materials.
一种新的方法已经被提出，以提高 X 射线微分析和背散射电子模式在可变压力或环境扫描电子显微镜（VP-ESEM）中的空间横向分辨率。这种方法基于两个概念之间的相关性：气体中的电子束裙边半径（R(S)）和 X 射线信号的产生体积半径（R(X)）以及材料中背散射电子的产生体积半径（R(BSE)）。为了跟踪 R(S)、R(X)和 R(BSE)之间的关系，使用了聚甲基丙烯酸甲酯聚合物、氧化硅和铝。模拟结果表明，存在着最佳的横向分辨率条件，称为 R（P，E），这取决于每种材料的压力和能量。这种方法将使我们能够提出一些最佳的实验条件来表征不同的材料。
