Terauchi Masami, Takahashi Hideyuki, Handa Nobuo, Murano Takanori, Koike Masato, Kawachi Tetsuya, Imazono Takashi, Hasegawa Noboru, Koeda Masaru, Nagano Tetsuya, Sasai Hiroyuki, Oue Yuki, Yonezawa Zeno, Kuramoto Satoshi
IMRAM, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan.
Microscopy (Oxf). 2013 Jun;62(3):391-5. doi: 10.1093/jmicro/dfs129. Epub 2013 Jan 10.
A new multilayer-coated varied line-spaced grating, JS4000, was fabricated and tested for extending the upper limit of a grating X-ray spectrometer for electron microscopy. This grating was designed for 2-3.8 keV at a grazing incidence angle of 1.35°. It was revealed that this new multilayer structure enables us to take soft-X-ray emission spectra continuously from 1.5 to 4.3 keV at the same optical setting. The full-width at half maximum of Te-L(α1,2) (3.8 keV) emission peak was 27 eV. This spectrometer was applied to indium tin oxide particles and clearly resolved Sn-L(α) (3444 eV) and In-L(β1) (3487 eV) peaks, which could not be resolved by a widely used energy-dispersive X-ray spectrometer.
制造了一种新型多层涂层变线间距光栅JS4000，并对其进行了测试，以扩展用于电子显微镜的光栅X射线光谱仪的上限。该光栅设计用于掠入射角为1.35°时的2 - 3.8 keV。结果表明，这种新的多层结构使我们能够在相同的光学设置下连续获取1.5至4.3 keV的软X射线发射光谱。Te-L(α1,2)（3.8 keV）发射峰的半高宽为27 eV。该光谱仪应用于氧化铟锡颗粒，清晰地分辨出了Sn-L(α)（3444 eV）和In-L(β1)（3487 eV）峰，而这些峰是广泛使用的能量色散X射线光谱仪无法分辨的。
