通过电子束光刻技术精确制备的 TiO2 纳米线气体传感器的传感性能。
Sensing performance of precisely ordered TiO2 nanowire gas sensors fabricated by electron-beam lithography.
机构信息
Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan.
出版信息
Sensors (Basel). 2013 Jan 11;13(1):865-74. doi: 10.3390/s130100865.
In this study, electron beam lithography, rather than the most popular method, chemical synthesis, is used to construct periodical TiO(2) nanowires for a gas sensor with both robust and rapid performance. The effects of temperature on the sensing response and reaction time are analyzed at various operation temperatures ranging from 200 to 350 °C. At the optimized temperature of 300 °C, the proposed sensor repeatedly obtained a rise/recovery time (ΔR: 0.9 R(0) to 0.1 R(0)) of 3.2/17.5 s and a corresponding sensor response (ΔR/R(0)) of 21.7% at an ethanol injection mass quantity of 0.2 μg.
在这项研究中，我们使用电子束光刻技术（而不是最流行的化学合成方法）来构建周期性的 TiO(2)纳米线，用于制造具有稳健和快速性能的气体传感器。分析了在 200 至 350°C 的不同工作温度下，温度对传感响应和反应时间的影响。在优化的 300°C 温度下，所提出的传感器在每次乙醇注入质量为 0.2μg 时，重复获得了 3.2/17.5s 的上升/恢复时间（ΔR：0.9R(0) 到 0.1R(0)) 和 21.7%的相应传感器响应（ΔR/R(0))。
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