College of Automation, Harbin Engineering University, No. 145 Nantong Street, Harbin 150001, Heilongjiang, China.
Sensors (Basel). 2013 Jan 28;13(2):1651-63. doi: 10.3390/s130201651.
This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and the elements of sense-mode are set around the drive-mode, which thus makes it possible to combine several gyroscope units into a gyroscope array through sense-modes of all the units. The complete 2-DOF vibratory structure is utilized in both the drive-mode and sense-mode of the gyroscope unit, thereby providing the desired bandwidth and inherent robustness. The gyroscope array combines several gyroscope units by using the unique detection mass, which will increase the gain of sense-mode and improve the sensitivity of the system. The simulation results demonstrate that, compared to a single gyroscope unit, the gain of gyroscope array (n = 6) is increased by about 8 dB; a 3 dB bandwidth of 100 Hz in sense-mode and 190 Hz in drive-mode are also provided. The bandwidths of both modes are highly matched with each other, providing a bandwidth of 100 Hz for the entire system, thus illustrating that it could satisfy the requirements in practical applications.
本文报道了一种新颖的四自由度（DOF）MEMS 振动陀螺仪。然后，使用新型陀螺仪单元呈现了一个 MEMS 陀螺仪阵列。在提出的四自由度 MEMS 振动陀螺仪的设计中，驱动模式的元素设置在整个陀螺仪结构内部，而感测模式的元素设置在驱动模式周围，从而可以通过所有单元的感测模式将几个陀螺仪单元组合成一个陀螺仪阵列。完整的二维自由度振动结构被用于陀螺仪单元的驱动模式和感测模式，从而提供所需的带宽和固有鲁棒性。陀螺仪阵列通过使用独特的检测质量来组合几个陀螺仪单元，这将增加感测模式的增益并提高系统的灵敏度。仿真结果表明，与单个陀螺仪单元相比，陀螺仪阵列（n=6）的增益增加了约 8 dB；感测模式的 3 dB 带宽为 100 Hz，驱动模式的带宽为 190 Hz。两种模式的带宽高度匹配，为整个系统提供了 100 Hz 的带宽，从而表明它可以满足实际应用的要求。
