Tooker Angela, Tolosa Vanessa, Shah Kedar G, Sheth Heeral, Felix Sarah, Delima Terri, Pannu Satinderpall
Lawrence Livermore National Laboratory, Livermore, CA 94550, USA.
Annu Int Conf IEEE Eng Med Biol Soc. 2012;2012:5999-6002. doi: 10.1109/EMBC.2012.6347361.
We present here a demonstration of a dual-sided, 4-layer metal, polyimide-based electrode array suitable for neural stimulation and recording. The fabrication process outlined here utilizes simple polymer and metal deposition and etching steps, with no potentially harmful backside etches or long exposures to extremely toxic chemicals. These polyimide-based electrode arrays have been tested to ensure they are fully biocompatible and suitable for long-term implantation; their flexibility minimizes the injury and glial scarring that can occur at the implantation site. The creation of dual-side electrode arrays with more than two layers of trace metal enables the fabrication of neural probes with more electrodes without a significant increase in probe size. This allows for more stimulation/recording sites without inducing additional injury and glial scarring.
我们在此展示一种适用于神经刺激和记录的双面、四层金属、聚酰亚胺基电极阵列。这里概述的制造工艺采用简单的聚合物和金属沉积及蚀刻步骤,不存在潜在有害的背面蚀刻或长时间暴露于剧毒化学品的情况。这些聚酰亚胺基电极阵列已经过测试,以确保它们完全生物相容且适合长期植入;其灵活性可将植入部位可能出现的损伤和胶质瘢痕形成降至最低。创建具有两层以上微量金属的双侧电极阵列能够制造出具有更多电极的神经探针,而不会显著增加探针尺寸。这使得可以有更多的刺激/记录位点,同时不会引起额外的损伤和胶质瘢痕形成。