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设计用于测量水面油膜厚度的差分激光三角测量光学装置。

Designing an optical set-up of differential laser triangulation for oil film thickness measurement on water.

作者信息

Ge Baozhene, Sun Jingbin, Liu Pengcheng, Lü Qieni, Wu Di

机构信息

College of Precision Instruments and Optoelectronics Engineering, Tianjin University, Key Laboratory of Optoelectronics Information Technology, Ministry of Education, Tianjin 300072, People's Republic of China.

出版信息

Rev Sci Instrum. 2013 Jan;84(1):013105. doi: 10.1063/1.4788937.

Abstract

Based on the differential laser triangulation principle, an optical system configuration for measuring the oil film thickness on water is designed and developed. A semiconductor laser of 650 nm wavelength with the maximum power of 5 mW is used as a light source, the magnification of the imaging system is 1.4; the range of the measurement is 0.1 mm-10 mm; the resolution is 2.3 μm and the measurement accuracy is 10 μm theoretically. Experiments are conducted with block gauges and feeler gauges, and the experimental results, with absolute error less than ±25 μm and the maximal measurable thickness 12 mm, indicate that this system presented in this paper can fulfill high accuracy.

摘要

基于差分激光三角测量原理,设计并开发了一种用于测量水面油膜厚度的光学系统结构。采用波长为650 nm、最大功率为5 mW的半导体激光器作为光源,成像系统的放大倍数为1.4;测量范围为0.1 mm - 10 mm;分辨率为2.3 μm,理论测量精度为10 μm。使用块规和塞尺进行了实验,实验结果表明,本文提出的该系统绝对误差小于±25 μm,最大可测厚度为12 mm,能够实现高精度测量。

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