Wu Chengxing, Chen Baijin, Ye Chunsheng, Yan Xiaopeng
State Key Laboratory of Material Processing and Die & Mould Technology, Huazhong University of Science and Technology, Wuhan 430074, China.
Sensors (Basel). 2019 Apr 18;19(8):1844. doi: 10.3390/s19081844.
The laser triangulation probe conveniently obtains surface topography data of a measured target. However, compared to the touch probe, its reliability and accuracy can be negatively affected by various factors associated with the object being measured and the probe itself. In this paper, to identify potential compensation strategies to improve the accuracy of depth measurement for laser triangulation probe, the measuring errors caused by an oil film on the measured surface, and the probe's position and orientation parameters with respect to the measuring object (including scan depth, incident angle, and azimuth angle), were studied. A theoretical model based on the geometrical optics, and an empirical model from the error evaluations, were established to quantitatively characterize the error influence of oil film and probe's parameters, respectively. We also investigated the influence pattern of different filtering methods with several comparison experiments. The verification procedures, measuring both a free-form surface (chevron-corrugated plate) and a gauge block covered with an oil film, demonstrate that these models and measurement suggestions are viable methods for predicting theoretical error and can be used as compensation references to improve the accuracy of depth measurement to the laser triangulation probe.
激光三角测量探头能够方便地获取被测目标的表面形貌数据。然而,与接触式探头相比,其可靠性和准确性会受到与被测物体及探头本身相关的各种因素的负面影响。本文为了确定提高激光三角测量探头深度测量精度的潜在补偿策略,研究了被测表面油膜、探头相对于测量物体的位置和方向参数(包括扫描深度、入射角和方位角)所引起的测量误差。分别建立了基于几何光学的理论模型和误差评估的经验模型,以定量表征油膜和探头参数的误差影响。我们还通过几个对比实验研究了不同滤波方法的影响模式。对自由曲面(人字形波纹板)和覆盖油膜的量块进行测量的验证程序表明,这些模型和测量建议是预测理论误差的可行方法,可作为补偿参考以提高激光三角测量探头的深度测量精度。