用于粗糙表面绝对距离测量的光子计数激光干涉仪。

Photon-counting laser interferometer for absolute distance measurement on rough surface.

作者信息

Pang Chengkai, Wu Di, Shi Haotian, Chen Xiuliang, Yang Lei, Li Zhaohui, Wu Guang

机构信息

State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.

出版信息

Rev Sci Instrum. 2019 Aug;90(8):083101. doi: 10.1063/1.5109913.

DOI:10.1063/1.5109913

PMID:31472633

Abstract

We designed a dual-wavelength photon-counting laser interferometer for absolute distance measurement of noncooperative targets. The weak optical interference on the rough surface was measured by a single-photon detector. The range of nonambiguity of the dual-wavelength interferometer was less than 1.2 μm, as the maximum errors of L and L were 7.8 nm and 9.1 nm caused by the photon-counting measurement and the frequency shift of the two unlocked lasers. We integrated laser triangulation into the interferometer as a coarse measurement, thus increasing the range of nonambiguity to 6.5 mm. As a result, a measurement standard deviation of ∼18 nm was achieved within a range of 1.1 mm in the experiment.

摘要

我们设计了一种双波长光子计数激光干涉仪，用于对非合作目标进行绝对距离测量。通过单光子探测器测量粗糙表面上的微弱光学干涉。由于光子计数测量以及两个未锁定激光器的频移导致的(L)和(L)的最大误差分别为(7.8)纳米和(9.1)纳米，双波长干涉仪的无模糊范围小于(1.2)微米。我们将激光三角测量法集成到干涉仪中作为粗测量，从而将无模糊范围增加到(6.5)毫米。结果，在实验中(1.1)毫米的范围内实现了约(18)纳米的测量标准偏差。