Department of Mechanical Engineering, Inha University, 253 Yonghyun-dong, Nam-Ku, Incheon 402-751, Korea.
Sensors (Basel). 2013 Mar 26;13(4):4088-101. doi: 10.3390/s130404088.
This study proposes new microcantilever designs in slotted step configuration to improve the S/N ratio of surface stress-based sensors used in physical, chemical, biochemical and biosensor applications. The cantilevers are made of silicon dioxide with a u-shaped silicon piezoresistor in p-doped. The cantilever step length and piezoresistor length is varied along with the operating voltage to characterise the surface stress sensitivity and thermal drifting sensitivity of the cantilevers when used as immunosensor. The numerical analysis is performed using ANSYS Multiphysics. Results show the surface stress sensitivity and the S/N ratio of the slotted step cantilevers is improved by more than 32% and 22%, respectively, over its monolithic counterparts.
本研究提出了新型开槽台阶结构的微悬臂梁设计，以提高用于物理、化学、生物化学和生物传感器应用的基于表面应力的传感器的信噪比。悬臂梁由二氧化硅制成，其中嵌入了 p 型掺杂的 u 型硅压阻传感器。悬臂梁的台阶长度和压阻传感器长度随工作电压而变化，以表征作为免疫传感器使用时悬臂梁的表面应力灵敏度和热漂移灵敏度。数值分析使用 ANSYS Multiphysics 进行。结果表明，与整体式悬臂梁相比，开槽台阶悬臂梁的表面应力灵敏度和信噪比分别提高了 32%和 22%以上。
