Ansari Mohd Zahid, Cho Chongdu
1PDPM-Indian Institute of Information Technology, Design and Manufacturing-Jabalpur, Khamaria, Jabalpur, 482-005 MP India.
2Department of Mechanical Engineering, Inha University, 100 Inha-Ro, Nam-Ku, Incheon, 402-751 Republic of Korea.
Microsyst Technol. 2016;22(9):2279-2285. doi: 10.1007/s00542-015-2615-3. Epub 2015 Jul 11.
Surface stress is a versatile and efficient means to study various physical, chemical, biochemical and biological processes. This work focuses on developing high sensitive piezoresistive microcantilever designs to study surface stress. The cantilevers are made of silicon with rectangular holes at their base that also circumscribe a piezoresistor sensing element. To find the optimum design, the effects of change in cantilever width, rectangular hole length and type of dopant on mechanical properties like deflection, frequency and maximum stress are characterised using finite element analysis software. The surface stress sensitivity characteristics of the different cantilever designs is ascertained by applying a surface stress on their top surfaces. Results show that the sensitivity is increased by increasing the cantilever width as well as the length of the hole and the sensitivity of p-type designs is more than two times the n-type.
表面应力是研究各种物理、化学、生物化学和生物过程的一种通用且有效的手段。这项工作专注于开发高灵敏度的压阻式微悬臂梁设计以研究表面应力。这些悬臂梁由硅制成，在其底部有矩形孔，这些孔还围绕着一个压阻式传感元件。为了找到最佳设计，使用有限元分析软件对悬臂梁宽度、矩形孔长度和掺杂剂类型的变化对诸如挠度、频率和最大应力等力学性能的影响进行了表征。通过在不同悬臂梁设计的顶表面施加表面应力来确定其表面应力灵敏度特性。结果表明，通过增加悬臂梁宽度以及孔的长度可以提高灵敏度，并且p型设计的灵敏度是n型的两倍多。
