University of Windsor, Windsor, ON, Canada.
IEEE Trans Ultrason Ferroelectr Freq Control. 2013 Apr;60(4):834-45. doi: 10.1109/TUFFC.2013.2632.
A highly accurate mathematical method has been presented for analytical characterization of capacitive micromachined ultrasonic transducers (CMUTs) built with square diaphragms. The method uses a new two-dimensional polynomial function to more accurately predict the deflection curve of a multilayer square diaphragm subject to both mechanical and electrostatic pressure and a new capacitance model that takes into account the contribution of the fringing field capacitances. Both of the models have been experimentally verified by comparing the models predicted values with measurement results and are found to be in excellent agreement with a maximum deviation of less than 2% for experimentally measured capacitance values. 3-D electromechanical finite element analysis (FEA) for a wide range of material properties, geometric specifications, and loading conditions show that the presented method is highly consistent in accuracy over the typical square-diaphragm CMUT design space.
提出了一种用于分析具有方形膜片的电容式微机械超声换能器 (CMUT) 的高精度数学方法。该方法使用新的二维多项式函数更准确地预测多层方形膜片在机械和静电压力下的挠度曲线，以及考虑边缘场电容贡献的新电容模型。这两个模型都通过将模型预测值与测量结果进行比较来进行实验验证，发现与实验测量电容值的最大偏差小于 2%，具有极好的一致性。针对广泛的材料特性、几何规格和加载条件的 3-D 机电有限元分析 (FEA) 表明，所提出的方法在典型的方形膜片 CMUT 设计空间中具有高度的准确性。
