Joint School of Nanoscience and Nanoengineering, Department of Nanoscience, University of North Carolina Greensboro, Greensboro, NC 27401, USA.
Microsc Microanal. 2013 Jun;19(3):740-4. doi: 10.1017/S1431927613000500. Epub 2013 Apr 29.
We describe a novel method for in situ measurement of the local thickness of a freely suspended solid-state membrane after thinning with a focused helium ion beam. The technique utilizes a custom stage for the helium ion microscope that allows the secondary electron detector used for normal imaging to collect information from ions transmitted through the sample. We find that relative brightness in the transmission image scales directly with the membrane thickness as determined by atomic force microscopy measurements.
我们描述了一种新的方法，用于在使用聚焦氦离子束减薄后原位测量自由悬挂的固态膜的局部厚度。该技术利用氦离子显微镜的定制载物台，允许用于正常成像的二次电子探测器收集穿过样品的离子的信息。我们发现，透射图像中的相对亮度与原子力显微镜测量确定的膜厚度直接成比例。
