Laboratory on Inertial Science and Technology, Beihang University, Beijing 100191, China.
Opt Lett. 2013 May 1;38(9):1416-8. doi: 10.1364/OL.38.001416.
A photonic crystal ring resonator (PCRR) of air hole arrays is fabricated on a silicon-on-insulator wafer by using electron-beam lithography and inductively coupled plasma etching. The designed PCRR is modeled and its performance is simulated by the two-dimensional finite difference time domain method. The simulation results show that the PCRR has two resonant wavelengths, 1598 and 1606 nm, and their corresponding quality factors are 3994 and 4015, respectively. A sample of the PCRR structure is fabricated and tested by the established experimental setup. Compared with the simulation results, the experimental resonant wavelengths drift to some extent and the quality factors are reduced by about one order of magnitude. The fabrication error and irregularity are the main reasons for the above results, which can be further reduced by improving the process technology. In addition, one more resonant wavelength emerged for the PCRR sample, which can be attributed to the change of the coupling strength.
光子晶体环形谐振器（PCRR）由硅通孔衬底上的空气孔阵列通过电子束光刻和感应耦合等离子体刻蚀工艺制作而成。通过二维有限差分时域方法对设计的 PCRR 进行建模和性能模拟。模拟结果表明，PCRR 有两个谐振波长，分别为 1598nm 和 1606nm，相应的品质因数分别为 3994 和 4015。制作了一个 PCRR 结构的样品，并通过建立的实验装置进行了测试。与模拟结果相比，实验中的谐振波长有一定程度的漂移，品质因数降低了约一个数量级。制作误差和不规则性是导致上述结果的主要原因，可以通过改进工艺技术进一步降低。此外，PCRR 样品出现了一个额外的谐振波长，这可以归因于耦合强度的变化。
