Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria.
Infineon Technologies Austria AG, 9520 Villach, Austria.
Sensors (Basel). 2023 May 22;23(10):4958. doi: 10.3390/s23104958.
This paper investigates the use of a miniaturized filter based on a triangular lattice of holes in a photonic crystal (PhC) slab. The plane wave expansion method (PWE) and finite-difference time-domain (FDTD) techniques were utilized to analyze the dispersion and transmission spectrum, as well as the quality factor and free spectral range (FSR) of the filter. A 3D simulation has demonstrated that for the designed filter, an FSR of more than 550 nm and a quality factor of 873 can be attained by adiabatically coupling light from a slab waveguide into a PhC waveguide. This work designs a filter structure that is implemented into the waveguide and is suitable for a fully integrated sensor. The small size of the device provides a strong potential for the realization of large arrays of independent filters on a single chip. The fully integrated character of this filter has further advantages such as reducing power loss in coupling light from sources to filters and also from filters to waveguides. The ease of fabrication is another benefit of completely integrating the filter.
本文研究了一种基于光子晶体（PhC）平板中三角形孔晶格的微型滤波器。平面波展开法（PWE）和时域有限差分法（FDTD）技术被用于分析滤波器的色散和传输谱、品质因数和自由光谱范围（FSR）。三维模拟表明，对于所设计的滤波器，通过从平板波导绝热耦合光到 PhC 波导，可以获得超过 550nm 的 FSR 和 873 的品质因数。这项工作设计了一种滤波器结构，该结构被实现到波导中，适用于完全集成的传感器。该器件的小尺寸为在单个芯片上实现大量独立滤波器提供了强大的潜力。这种滤波器的完全集成特性还具有其他优点，例如减少了从光源到滤波器以及从滤波器到波导的耦合光的功率损耗。完全集成的滤波器易于制造也是另一个优点。
