一种由硅基绝缘体纳米棒构成的光子晶体环形谐振器。

A photonic crystal ring resonator formed by SOI nano-rods.

作者信息

Chiu Wei-Yu, Huang Tai-Wei, Wu Yen-Hsiang, Chan Yi-Jen, Hou Chia-Hunag, Chien Huang Ta, Chen Chii-Chang

出版信息

Opt Express. 2007 Nov 12;15(23):15500-6. doi: 10.1364/oe.15.015500.

DOI:10.1364/oe.15.015500

PMID:19550835

Abstract

The design, fabrication and measurement of a silicon-on-insulator (SOI) two-dimensional photonic crystal ring resonator are demonstrated in this study. The structure of the photonic crystal is comprised of silicon nano-rods arranged in a hexagonal lattice on an SOI wafer. The photonic crystal ring resonator allows for the simultaneous separation of light at wavelengths of 1.31 and 1.55mum. The device is fabricated by e-beam lithography. The measurement results confirm that a 1.31mum/1.55mum wavelength ring resonator filter with a nano-rod photonic crystal structure can be realized.

摘要

本研究展示了绝缘体上硅（SOI）二维光子晶体环形谐振器的设计、制造和测量。光子晶体结构由排列在SOI晶圆上的六边形晶格中的硅纳米棒组成。光子晶体环形谐振器能够同时分离波长为1.31和1.55μm的光。该器件通过电子束光刻制造。测量结果证实，可以实现具有纳米棒光子晶体结构的1.31μm/1.55μm波长环形谐振器滤波器。