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在氩气氛围中 SiC 表面上石墨烯的 CVD 形成。

CVD formation of graphene on SiC surface in argon atmosphere.

机构信息

Institute of Theoretical Physics, Faculty of Physics, University of Warsaw, ul. Hoża 69, 00-681 Warszawa, Poland.

出版信息

Phys Chem Chem Phys. 2013 Jun 14;15(22):8805-10. doi: 10.1039/c3cp44378g. Epub 2013 May 2.

Abstract

We investigate the microscopic processes leading to graphene growth by the chemical vapor deposition of propane in an argon atmosphere at the SiC surface. Experimentally, it is known that the presence of argon fastens the dehydrogenation processes at the surface, at high temperatures of about 2000 K. We perform ab initio calculations, at zero temperature, to check whether chemical reactions can explain this phenomenon. Density functional theory and supporting quantum chemistry methods qualitatively describe formation of the graphene wafers. We find that the 4H-SiC(0001) surface exhibits a large catalytic effect in the adsorption process of hydrocarbon molecules, this is also supported by preliminary molecular dynamics results. The existence of the ArH(+) molecule, and an observation from the Raman spectra that the negative charge transfers into the SiC surface, would suggest that presence of argon atoms leads to a deprotonization on the surface, which is necessary to obtain a pure carbon adlayer. But the zero-temperature description shows that the cold environment is insufficient to promote argon-assisted surface cleaning.

摘要

我们研究了在碳化硅表面的氩气氛围中通过丙烷的化学气相沉积生长石墨烯的微观过程。实验上,已知氩气的存在会加速表面在约 2000 K 的高温下的脱氢过程。我们进行了零温下的第一性原理计算,以检查化学反应是否可以解释这一现象。密度泛函理论和支持的量子化学方法定性地描述了石墨烯片的形成。我们发现,4H-SiC(0001)表面在碳氢化合物分子的吸附过程中表现出很大的催化作用,这也得到了初步分子动力学结果的支持。ArH(+)分子的存在以及拉曼光谱中观察到的负电荷转移到 SiC 表面,表明氩原子的存在导致表面脱质子化,这是获得纯碳吸附层所必需的。但零温描述表明,低温环境不足以促进氩气辅助的表面清洁。

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