Department of Systems Design Engineering, University of Waterloo, Waterloo, ON, N2L 3G1, Canada.
Small. 2013 Oct 25;9(20):3385-9. doi: 10.1002/smll.201300553. Epub 2013 May 8.
A low density vertically aligned carbon nanotube-based field-emission cathode with a ballast resistor and coaxial gate is designed and fabricated. The ballast resistor can overcome the non-uniformity of the local field-enhancement factor at the emitter apex. The self-aligned fabrication process of the coaxial gate can avoid the effects of emitter tip misalignment and height non-uniformity.
设计并制作了一种基于低密度垂直排列碳纳米管的场发射阴极,带有负载电阻和同轴栅极。负载电阻可以克服发射尖端局部场增强因子的不均匀性。同轴栅极的自对准制造工艺可以避免发射尖端的错位和高度不均匀性的影响。