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自调节同质生长的高质量石墨烯在 Co-Cu 复合衬底上用于层控制。

Self-regulating homogenous growth of high-quality graphene on Co-Cu composite substrate for layer control.

机构信息

CAS Key Laboratory of Materials for Energy Conversion, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, China.

出版信息

Nanoscale. 2013 Jul 7;5(13):5847-53. doi: 10.1039/c3nr33124e. Epub 2013 May 22.

Abstract

The composite substrate of Co and Cu was proposed to grow homogenous high quality wafer-size graphene films by an atmosphere pressure CVD method. The composite substrate consists of a moderate-carbon-solubility metal top (Co coating) as a C-dissolving layer and a low-carbon-solubility metal base (Cu foil) as a C-rejecting layer. During the CVD process, the interdiffusion of Co and Cu atoms occurs in the composite. With the dynamic control on Co and Cu alloying process to affect the carbon solubility, active carbon atoms captured by the Co layer were segregated to form spontaneously a high-quality graphene film on the top of Cu-Co substrate. The tunable layer-number of the graphene films can be precisely controlled by adjusting the thickness of the Co layer. High quality single-layered graphene films with a 98% yield were prepared on an 80 nm-Co-coated Cu foil and insensitive to growth temperature and time. More importantly, this type of composite substrate has also been developed to grow AB-stacked bilayers and three-layer graphene with 99% surface coverage and absence of defects. The approach is opening up a new avenue for high-quality graphene production with precise layer control through composite substrate design.

摘要

提出了 Co 和 Cu 的复合衬底,通过常压 CVD 法生长同质高质量的晶圆级石墨烯薄膜。复合衬底由中等碳溶解度的金属顶层(Co 涂层)作为 C 溶解层和低碳溶解度的金属基底(Cu 箔)作为 C 排斥层组成。在 CVD 过程中,Co 和 Cu 原子发生互扩散。通过动态控制 Co 和 Cu 合金化过程来影响碳溶解度,被 Co 层捕获的活性碳原子被分离出来,在 Cu-Co 衬底的顶部自发形成高质量的石墨烯薄膜。通过调整 Co 层的厚度,可以精确控制石墨烯薄膜的可调层数。在 80nm-Co 涂层的 Cu 箔上制备了高质量的单层石墨烯薄膜,收率为 98%,对生长温度和时间不敏感。更重要的是,这种复合衬底也被开发用于生长 AB 堆叠双层和三层石墨烯,其覆盖率为 99%,没有缺陷。该方法通过复合衬底设计为高质量石墨烯的精确层控制生产开辟了新途径。

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