Uddin Mohammad Jalal, Magnusson Robert
Department of Electrical Engineering, University of Texas at Arlington, Box 19016, Arlington, Texas 76019, USA.
Opt Express. 2013 May 20;21(10):12495-506. doi: 10.1364/OE.21.012495.
We demonstrate the design and fabrication of a highly efficient guided-mode resonant color filter array. The device is designed using numerical methods based on rigorous coupled-wave analysis and is patterned using UV-laser interferometric lithography. It consists of a 60-nm-thick subwavelength silicon nitride grating along with a 105-nm-thick homogeneous silicon nitride waveguide on a glass substrate. The fabricated device exhibits blue, green, and red color response for grating periods of 274, 327, and 369 nm, respectively. The pixels have a spectral bandwidth of ~12 nm with efficiencies of 94%, 96%, and 99% at the center wavelength of blue, green, and red color filter, respectively. These are higher efficiencies than reported in the literature previously.
我们展示了一种高效的导模共振滤色器阵列的设计与制造。该器件基于严格耦合波分析，采用数值方法进行设计，并通过紫外激光干涉光刻进行图案化。它由一个60纳米厚的亚波长氮化硅光栅以及在玻璃衬底上的一个105纳米厚的均匀氮化硅波导组成。所制造的器件在光栅周期分别为274、327和369纳米时呈现蓝色、绿色和红色响应。这些像素的光谱带宽约为12纳米，在蓝色、绿色和红色滤色器的中心波长处效率分别为94%、96%和99%。这些效率高于之前文献中报道的效率。
