Hnatovsky Cyril, Shvedov Vladlen G, Krolikowski Wieslaw
Laser Physics Centre, Australian National University, Canberra ACT 0200, Australia.
Opt Express. 2013 May 20;21(10):12651-6. doi: 10.1364/OE.21.012651.
In this article we compare the results of micromachining of fused silica and silicon with tightly focused scalar (viz., circularly and linearly polarized) and vector (viz., azimuthally and radially polarized) femtosecond laser pulses. We show that drilling with radially polarized pulses produces holes with smoother and better-delineated walls compared with the other polarizations used, whereas linearly polarized pulses can machine 20-nm wide single grooves in fused silica when the electric field of the pulse is aligned perpendicular to the cutting direction. The observed polarization-controlled micromachining is due to the formation of sub-diffraction-limited nanostructures that are optically produced in the multi-pulse irradiation regime.
在本文中，我们比较了用紧聚焦标量（即圆偏振和线偏振）和矢量（即方位角偏振和径向偏振）飞秒激光脉冲对熔融石英和硅进行微加工的结果。我们表明，与其他使用的偏振相比，用径向偏振脉冲钻孔产生的孔壁更光滑且轮廓更清晰，而当脉冲电场与切割方向垂直对齐时，线偏振脉冲可以在熔融石英中加工出20纳米宽的单槽。观察到的偏振控制微加工是由于在多脉冲辐照 regime 中光学产生的亚衍射极限纳米结构的形成。
