Key factors for the dynamic ETEM observation of single atoms.

We present further modifications to aberration-corrected environmental transmission electron microscopy (AC-ETEM) for the dynamic HRTEM observation of single atoms. Additional pumping levels that include three additional turbomolecular pumps (TMPs) enable a base pressure of 3.5 × 10(-5) Pa in the sample chamber. The effect of these additional TMPs on image resolution was measured in reciprocal space using information limit (Young's fringes) on a standard cross grating sample and also with platinum (Pt) single atoms on an amorphous carbon film (Pt/a-carbon). The Pt/a-carbon was used for measuring the effect of gas pressure on single-atom imaging in addition to the evaluation of vibrations of TMPs, samples, magnetic lenses and a microscope column of the AC-ETEM. TMPs did not affect the ETEM imaging performance when an anti-vibration table was used, and 0.10-nm resolution was achieved. Dynamic ETEM observation of Pt single atoms was achieved in 4.0 × 10(-2) Pa of air, using a modified AC-ETEM system and a high-speed CCD camera with a time resolution of 0.05 s.