配备冷场发射枪的300千伏气体环境透射电子显微镜的设计

Design of a 300-kV gas environmental transmission electron microscope equipped with a cold field emission gun.

作者信息

Isakozawa Shigeto, Nagaoki Isao, Watabe Akira, Nagakubo Yasuhira, Saito Nobuhiro, Matsumoto Hiroaki, Zhang Xiao Feng, Taniguchi Yoshifumi, Baba Norio

机构信息

Hitachi High Technologies Corporation, 882 Ichige, Hitachinaka, Ibaraki 312-8504, Japan

Hitachi High Technologies Corporation, 882 Ichige, Hitachinaka, Ibaraki 312-8504, Japan.

出版信息

Microscopy (Oxf). 2016 Aug;65(4):353-62. doi: 10.1093/jmicro/dfw015. Epub 2016 May 3.

DOI:10.1093/jmicro/dfw015

PMID:27142511

Abstract

A new in situ environmental transmission electron microscope (ETEM) was developed based on a 300 kV TEM with a cold field emission gun (CFEG). Particular caution was taken in the ETEM design to assure uncompromised imaging and analytical performance of the TEM. Because of the improved pumping system between the gun and column, the vacuum of CFEG was largely improved and the probe current was sufficiently stabilized to operate without tip flashing for 2-3 h or longer. A high brightness of 2.5 × 10(9) A/cm(2) sr was measured at 300 kV, verifying the high quality of the CFEG electron beam. A specially designed gas injection-heating holder was used in the in situ TEM study at elevated temperatures with or without gas around the TEM specimen. Using this holder in a 10 Pa gas atmosphere and specimen temperatures up to 1000°C, high-resolution ETEM performance and analysis were achieved.

摘要

基于一台配备冷场发射枪（CFEG）的300 kV透射电子显微镜（TEM），开发了一种新型的原位环境透射电子显微镜（ETEM）。在ETEM的设计过程中特别谨慎，以确保TEM的成像和分析性能不受影响。由于改进了枪和柱之间的抽气系统，CFEG的真空度得到了很大提高，探针电流得到了充分稳定，能够在不发生针尖闪蒸的情况下运行2至3小时或更长时间。在300 kV下测得的高亮度为2.5×10(9) A/cm(2) sr，验证了CFEG电子束的高质量。在原位TEM研究中，在TEM样品周围有或没有气体的高温情况下，使用了一种专门设计的气体注入加热支架。在10 Pa的气体气氛和高达1000°C的样品温度下使用该支架，实现了高分辨率的ETEM性能和分析。