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牺牲柱模板法用于嵌段共聚物自组装。

Sacrificial-post templating method for block copolymer self-assembly.

机构信息

Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA; NUS Graduate School for Integrative Sciences & Engineering (NGS), 117456, Singapore.

出版信息

Small. 2014 Feb 12;10(3):493-9, 418. doi: 10.1002/smll.201301066. Epub 2013 Jul 10.

Abstract

A sacrificial-post templating method is presented for directing block copolymer self-assembly to form nanostructures consisting of monolayers and bilayers of microdomains. In this approach, the topographical post template is removed after self-assembly and therefore is not incorporated into the final microdomain pattern. Arrays of nanoscale holes of different shapes and symmetries, including mesh structures and perforated lamellae with a bimodal pore size distribution, are produced. The ratio of the pore sizes in the bimodal distributions can be varied via the template pitch, and agrees with predictions of self consistent field theory.

摘要

提出了一种牺牲柱模板法,用于指导嵌段共聚物自组装形成由单层和双层微区组成的纳米结构。在这种方法中,在自组装后去除形貌柱模板,因此它不会被纳入最终的微区图案中。制备了具有不同形状和对称性的纳米尺度孔阵列,包括网孔结构和具有双峰孔径分布的穿孔薄片。双峰分布中的孔径比可以通过模板间距进行调节,并且与自洽场理论的预测相符。

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