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用于生物传感应用的具有发射滤光片的低光照度 CMOS 接触式图像传感器。

A Low-Light CMOS Contact Imager With an Emission Filter for Biosensing Applications.

出版信息

IEEE Trans Biomed Circuits Syst. 2008 Sep;2(3):193-203. doi: 10.1109/TBCAS.2008.2001866.

DOI:10.1109/TBCAS.2008.2001866
PMID:23852969
Abstract

In this paper, a fully functional low light 128 X 128 contact image sensor for cell detection in biosensing applications is presented. The imager, fabricated in 0.18 mum CMOS technology, provides low-noise operation by employing both a modified version of the active reset (AR) technique and a modified version of the active column sensor (ACS) readout method. High-sensitivity, low noise performance of the presented sensor is well-suited for fluorescence imaging. For this purpose, an emission filter was fabricated and integrated with the sensor. The filter was fabricated using PDMS and Sudan II Blue dye mix, spin-coated and deposited in a class 1000 clean room. The designed filter is suitable for excitation at wavelengths below 340 nm and emission at 450 nm and above. The fabricated imager architecture and operation are described, noise analysis is presented and measurements from a test chip are shown. Experimental results using live neurons from the pond snail, Lymnaea stagnalis, and fluorescence polystyrene micro-beads prove the functionality of the fabricated system and indicate its biocompatiblity.

摘要

本文提出了一种用于生物传感应用中细胞检测的全功能低光 128 X 128 接触式图像传感器。该成像仪采用改进的有源复位 (AR) 技术和改进的有源列传感器 (ACS) 读出方法,结合 0.18 微米 CMOS 技术制造,可实现低噪声操作。所提出的传感器具有高灵敏度、低噪声性能,非常适合荧光成像。为此,制造了一个发射滤波器并将其与传感器集成在一起。该滤波器采用 PDMS 和苏丹 II 蓝染料混合物制造,通过旋涂和在 1000 级洁净室中沉积来制造。设计的滤波器适用于 340nm 以下的激发和 450nm 以上的发射。描述了制造的成像仪架构和操作,给出了噪声分析,并展示了测试芯片的测量结果。使用来自池塘蜗牛、Lymnaea stagnalis 的活神经元和荧光聚苯乙烯微球的实验结果证明了所制造系统的功能,并表明其具有生物相容性。

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