Pang Fei, Liang Xuejin, Chen Dongmin
Department of Physics, Renmin University of China, Beijing 100872, China.
Rev Sci Instrum. 2013 Jul;84(7):076104. doi: 10.1063/1.4816536.
We present a simple method to fabricate microscopic four-point probe (M4PP) with spacing of 70-100 μm for conductivity measurements in ultrahigh vacuum. The probe includes four gold wires with 30 μm diameter and a 0.5 mm thickness sapphire slice as cantilever. One of the dual scanning tunneling microscope (DSTM) is replaced by M4PP. As a result, in situ transport measurement could be performed by M4PP and investigation of surface morphology by STM. Finally, we measure conductivity of 14 monolayer Bi(111) epitaxial film on n type Si which is 1.6 × 10(-3) Ω(-1)∕[larger open square].
我们提出了一种简单的方法来制造间距为70 - 100μm的微观四点探针（M4PP），用于超高真空环境下的电导率测量。该探针包括四根直径为30μm的金线和一片厚度为0.5mm的蓝宝石片作为悬臂。双扫描隧道显微镜（DSTM）中的一个被M4PP取代。因此，M4PP可用于原位输运测量，而STM则用于表面形貌研究。最后，我们测量了n型硅上14单层Bi(111)外延膜的电导率，其值为1.6×10⁻³Ω⁻¹/[大正方形] 。
