一种采用 HTCC MEMS 技术的用于恶劣环境的无线无源压力微传感器。

A wireless passive pressure microsensor fabricated in HTCC MEMS technology for harsh environments.

机构信息

Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China.

出版信息

Sensors (Basel). 2013 Aug 2;13(8):9896-908. doi: 10.3390/s130809896.

DOI:10.3390/s130809896

PMID:23917261

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC3812585/

Abstract

A wireless passive high-temperature pressure sensor without evacuation channel fabricated in high-temperature co-fired ceramics (HTCC) technology is proposed. The properties of the HTCC material ensure the sensor can be applied in harsh environments. The sensor without evacuation channel can be completely gastight. The wireless data is obtained with a reader antenna by mutual inductance coupling. Experimental systems are designed to obtain the frequency-pressure characteristic, frequency-temperature characteristic and coupling distance. Experimental results show that the sensor can be coupled with an antenna at 600 °C and max distance of 2.8 cm at room temperature. The senor sensitivity is about 860 Hz/bar and hysteresis error and repeatability error are quite low.

摘要

提出了一种基于高温共烧陶瓷（HTCC）技术的无抽空通道无线无源高温压力传感器。该 HTCC 材料的特性确保了传感器可以在恶劣环境中应用。该无抽空通道的传感器可以完全密封。无线数据通过阅读器天线的互感耦合获得。设计了实验系统以获得频率-压力特性、频率-温度特性和耦合距离。实验结果表明，该传感器可以在 600°C 下与天线耦合，在室温下最大距离为 2.8cm。传感器的灵敏度约为 860Hz/bar，滞后误差和重复性误差都很低。