基于LC谐振的无源压力传感器的设计与制造

Design and Manufacturing of a Passive Pressure Sensor Based on LC Resonance.

作者信息

Zheng Cheng, Li Wei, Li An-Lin, Zhan Zhan, Wang Ling-Yun, Sun Dao-Heng

机构信息

Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, China.

出版信息

Micromachines (Basel). 2016 May 10;7(5):87. doi: 10.3390/mi7050087.

DOI:10.3390/mi7050087

PMID:30404262

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6189834/

Abstract

The resonator-based passive pressure sensor attracts much attention because it does not need a power source or lead wires between the sensing element and the readout system. This paper presents the design and manufacturing of a passive pressure sensor that contains a variable capacitor and a copper-electroplated planar inductor. The sensor is fabricated using silicon bulk micro-machining, electroplating, and anodic bonding technology. The finite element method is used to model the deflection of the silicon diaphragm and extract the capacitance change corresponding to the applied pressure. Within the measurement range from 5 to 100 kPa, the sensitivity of the sensor is 0.052 MHz/kPa, the linearity is 2.79%, and the hysteresis error is 0.2%. Compared with the sensitivity at 27 °C, the drop of output performance is 3.53% at 140 °C.

摘要

基于谐振器的无源压力传感器备受关注，因为它无需电源，且传感元件与读出系统之间无需引线。本文介绍了一种包含可变电容器和镀铜平面电感的无源压力传感器的设计与制造。该传感器采用体硅微机械加工、电镀和阳极键合技术制造。利用有限元方法对硅膜片的挠度进行建模，并提取与施加压力相对应的电容变化。在5至100 kPa的测量范围内，该传感器的灵敏度为0.052 MHz/kPa，线性度为2.79%，滞后误差为0.2%。与27°C时的灵敏度相比，在140°C时输出性能下降了3.53%。