一种用于被动 LC 高温压力传感器的陶瓷扩散键合方法。

A Ceramic Diffusion Bonding Method for Passive LC High-Temperature Pressure Sensor.

机构信息

Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China.

Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China.

出版信息

Sensors (Basel). 2018 Aug 14;18(8):2676. doi: 10.3390/s18082676.

DOI:10.3390/s18082676

PMID:30110982

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6111589/

Abstract

Alumina ceramic is a highly promising material for fabricating high-temperature pressure sensors. In this paper, a direct bonding method for fabricating a sensitive cavity with alumina ceramic is presented. Alumina ceramic substrates were bonded together to form a sensitive cavity for high-temperature pressure environments. The device can sense pressure parameters at high temperatures. To verify the sensitivity performance of the fabrication method in high-temperature environments, an inductor and capacitor were integrated on the ceramic substrate with the fabricated sensitive cavity to form a wireless passive LC pressure sensor with thick-film integrated technology. Finally, the fabricated sensor was tested using a system test platform. The experimental results show that the sensor can realize pressure measurements above 900 °C, confirming that the fabricated sensitive cavity has excellent sealing properties. Therefore, the direct bonding method can potentially be used for developing all-ceramic high-temperature pressure sensors for application in harsh environments.

摘要

氧化铝陶瓷是制造高温压力传感器的一种极具前景的材料。本文提出了一种用氧化铝陶瓷制造敏感腔的直接键合方法。氧化铝陶瓷基底被键合在一起，形成用于高温高压环境的敏感腔。该器件可用于测量高温下的压力参数。为了验证该制造方法在高温环境下的灵敏度性能，采用厚膜集成技术在陶瓷基底上集成了电感器和电容器，形成了带有敏感腔的无线无源 LC 压力传感器。最后，使用系统测试平台对制造的传感器进行了测试。实验结果表明，该传感器可实现 900°C 以上的压力测量，证实了所制造的敏感腔具有优异的密封性能。因此，直接键合方法有望用于开发用于恶劣环境的全陶瓷高温压力传感器。