Department of Electronic Engineering, University of Tor Vergata, Via del Politecnico 1, I-00133 Rome, Italy.
Nanotechnology. 2013 Sep 6;24(35):355503. doi: 10.1088/0957-4484/24/35/355503. Epub 2013 Aug 7.
Resonant sensors with nanostructured surfaces have long been considered as an emergent platform for high-sensitivity transduction because of the potentially very large sensing areas. Nevertheless, until now only complex, time-consuming, expensive and sub-optimal fabrication procedures have been described; in fact, especially with reference to in-liquid applications, very few devices have been reported. Here, we first demonstrate that, by immersing standard, ultra-low-cost quartz resonators with un-polished silver electrodes in a conventional zinc nitrate/HMTA equimolar nutrient solution, the gentle contamination from the metallic package allows direct growth on the electrodes of arrays of high-density (up to 10 μm⁻²) and well-separated (no fusion at the roots) ZnO nanowires without any seed layer or thermal annealing. The combination of high-density and good separation is ideal for increasing the sensing area; moreover, this uniquely simple, single-step process is suitable for conventional, ultra-low-cost and high-frequency quartzes, and results in devices that are already packaged and ready to use. As an additional advantage, the process parameters can be effectively optimized by measuring the quartz admittance before and after growth. As a preliminary test, we show that the sensitivity to the liquid properties of high-frequency (i.e. high sensitivity) quartzes can be further increased by nearly one order of magnitude and thus show the highest ever reported frequency shifts of an admittance resonance in response to immersion in both ethanol and water.
具有纳米结构表面的谐振传感器因其具有潜在的非常大的传感面积而长期以来被认为是一种用于高灵敏度转换的新兴平台。然而,到目前为止,只描述了复杂、耗时、昂贵和次优的制造工艺;事实上,特别是对于在液体内的应用,很少有设备被报道。在这里,我们首先证明,通过将带有未抛光银电极的标准、超低成本石英谐振器浸入常规的硝酸锌/ HMTA 等摩尔营养溶液中,来自金属封装的温和污染可以直接在电极上生长出高密度(高达 10 μm⁻²)且分离良好(根部无融合)的 ZnO 纳米线阵列,而无需任何种子层或热退火。高密度和良好分离的组合有利于增加传感面积;此外,这种独特的简单、单步工艺适用于常规、超低成本和高频石英,并且得到的器件已经封装并可直接使用。作为另一个优点,通过在生长前后测量石英导纳,可以有效地优化工艺参数。作为初步测试,我们表明,高频(即高灵敏度)石英对液体性质的灵敏度可以进一步提高近一个数量级,因此显示了在响应浸入乙醇和水时,导纳共振中报告的最高频率位移。