Department of Mechanical Engineering, National University of Singapore, Singapore.
Opt Lett. 2013 Jun 15;38(12):2005-7. doi: 10.1364/OL.38.002005.
We demonstrate tuning of double-coupled one-dimensional photonic crystal cavities by their out-of-plane nanomechanical deformations. The coupled cavities are pulled by the vertical electrostatic force generated by the potential difference between the device layer and the handle layer in a silicon-on-insulator chip, and the induced deformations are analyzed by the finite element method. Applied with a voltage of 12 V, the cavities obtain a redshift of 0.0405 nm (twice the linewidth) for their second-order odd resonance mode and a blueshift of 0.0635 nm (three times the linewidth) for their second-order even resonance mode, which are mainly attributed to out-of-plane relative displacement. Out-of-plane tuning of coupled cavities does not need actuators and corresponding circuits; thus the device is succinct and compact. This working principle can be potentially applied in chip-level optoelectronic devices, such as sensors, switches, routers, and tunable filters.
我们通过二维光子晶体腔的面外纳米机械变形来实现双耦合一维光子晶体腔的调谐。通过在绝缘体上硅芯片中器件层和衬底层之间的电势差产生的垂直静电力来拉伸耦合腔，通过有限元方法分析诱导的变形。施加 12 V 的电压后，腔的二阶奇模的红移为 0.0405nm（两倍线宽），二阶偶模的蓝移为 0.0635nm（三倍线宽），这主要归因于面外相对位移。耦合腔的面外调谐不需要执行器和相应的电路；因此，器件简洁紧凑。这一工作原理可以潜在地应用于片上光电设备，如传感器、开关、路由器和可调滤波器。
