Chew Xiongyeu, Zhou Guangya, Yu Hongbin, Chau Fook Siong, Deng Jie, Loke Yee Chong, Tang Xiaosong
1Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, 117576 Singapore.
Opt Express. 2010 Oct 11;18(21):22232-44. doi: 10.1364/OE.18.022232.
Control of photonic crystal resonances in conjunction with large spectral shifting is critical in achieving reconfigurable photonic crystal devices. We propose a simple approach to achieve nano-mechanical control of photonic crystal resonances within a compact integrated on-chip approach. Three different tip designs utilizing an in-plane nano-mechanical tuning approach are shown to achieve reversible and low-loss resonance control on a one-dimensional photonic crystal nanocavity. The proposed nano-mechanical approach driven by a sub-micron micro-electromechanical system integrated on low loss suspended feeding nanowire waveguide, achieved relatively large resonance spectral shifts of up to 18 nm at a driving voltage of 25 V. Such designs may potentially be used as tunable optical filters or switches.
结合大光谱移动来控制光子晶体共振对于实现可重构光子晶体器件至关重要。我们提出了一种简单的方法,通过紧凑的集成片上方法实现对光子晶体共振的纳米机械控制。利用面内纳米机械调谐方法的三种不同尖端设计被证明可在一维光子晶体纳米腔上实现可逆且低损耗的共振控制。由集成在低损耗悬浮馈电纳米线波导上的亚微米微机电系统驱动的所提出的纳米机械方法,在25 V的驱动电压下实现了高达18 nm的相对较大的共振光谱移动。此类设计可能潜在地用作可调谐光学滤波器或开关。