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通过纳米球光刻实现高度可调谐的自组装等离子体晶格。

Highly tunable self-assembled plasmonic lattices through nanosphere lithography.

机构信息

Department of Electrical Engineering and Computer Science, South Dakota State University, Brookings, South Dakota 57006, USA.

出版信息

Opt Lett. 2013 Jun 15;38(12):2153-5. doi: 10.1364/OL.38.002153.

Abstract

This Letter reports a method to produce two-dimensional self-assembled plasmonic nanopillar (NP) arrays with independent control of the diameter (d), spacing (s), and height (h) of the NPs. A plasmonic lattice was designed and optimized for maximum plasmonic activity at 980 nm using three-dimensional finite-difference time-domain simulations. The optimized lattice with d=365 nm, s=410 nm, and h=70 nm was fabricated utilizing a self-assembled nanosphere lithography approach. Outstanding agreement between the observed and predicted results confirms the validity of the design process and the controllability and repeatability of the fabrication process. The excellent short-range order in the lattice structure suggests that this method can replace the electron-beam lithography approach in a scalable and cost-effective manner.

摘要

这封信件报告了一种产生二维自组装等离子体纳米柱(NP)阵列的方法,该方法可以独立控制 NPs 的直径(d)、间距(s)和高度(h)。使用三维有限差分时域模拟,设计并优化了一个等离子体晶格,以在 980nm 处获得最大的等离子体活性。使用自组装纳米球光刻法制造了具有 d=365nm、s=410nm 和 h=70nm 的优化晶格。观察到的和预测的结果之间非常吻合,证实了设计过程的有效性以及制造过程的可控性和可重复性。晶格结构中的优异短程有序表明,该方法可以以可扩展且具有成本效益的方式替代电子束光刻方法。

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