Mesoscale Chemical Systems Group, MESA+ Research Institute, University of Twente, ME147, P.O. Box 217, 7500AE Enschede, The Netherlands.
Biomicrofluidics. 2012 Aug 21;6(3):34114. doi: 10.1063/1.4747166. eCollection 2012 Sep.
We present an ultrasonic device with the ability to locally remove deposited layers from a glass slide in a controlled and rapid manner. The cleaning takes place as the result of cavitating bubbles near the deposited layers and not due to acoustic streaming. The bubbles are ejected from air-filled cavities micromachined in a silicon surface, which, when vibrated ultrasonically at a frequency of 200 kHz, generate a stream of bubbles that travel to the layer deposited on an opposing glass slide. Depending on the pressure amplitude, the bubble clouds ejected from the micropits attain different shapes as a result of complex bubble interaction forces, leading to distinct shapes of the cleaned areas. We have determined the removal rates for several inorganic and organic materials and obtained an improved efficiency in cleaning when compared to conventional cleaning equipment. We also provide values of the force the bubbles are able to exert on an atomic force microscope tip.
我们提出了一种超声装置，能够以可控和快速的方式局部去除载玻片上的沉积层。清洗是由于沉积层附近的空化气泡，而不是由于声流造成的。气泡是从硅表面微加工的充满空气的腔中喷出的，当以 200 kHz 的频率超声振动时，会产生一股气泡流，流向沉积在 opposing glass slide 上的层。根据压力幅度的不同，从微坑中喷出的气泡云由于复杂的气泡相互作用力而呈现出不同的形状，从而导致清洁区域的不同形状。我们已经确定了几种无机和有机材料的去除率，并与传统的清洗设备相比，获得了更高的清洗效率。我们还提供了气泡能够对原子力显微镜尖端施加的力的值。
