Institut Néel, CNRS, Université Joseph Fourier and Grenoble INP, 25 rue des Martyrs, Grenoble, France.
Nanotechnology. 2013 Sep 20;24(37):375304. doi: 10.1088/0957-4484/24/37/375304. Epub 2013 Aug 23.
We report a novel method for the fabrication of superconducting nano-devices based on niobium. The well-known difficulties of lithographic patterning of high-quality niobium are overcome by replacing the usual organic resist mask by a metallic one. The quality of the fabrication procedure is demonstrated by the realization and characterization of long and narrow superconducting lines and niobium-gold-niobium proximity SQUIDs.
我们报告了一种基于铌的超导纳米器件制造的新方法。通过用金属掩模代替通常的有机抗蚀剂掩模，克服了高质量铌的光刻图形化的已知难题。通过实现和表征长而窄的超导线和铌-金-铌超导量子干涉器（SQUID），证明了制造工艺的质量。
