State Key Laboratory for Manufacturing System Engineering & Key Laboratory of Photonics Technology for Information of Shaanxi Province, School of Electronics & Information Engineering, Xi'an Jiaotong University , Xi'an 710049, P. R. China.
ACS Appl Mater Interfaces. 2013 Oct 9;5(19):9382-5. doi: 10.1021/am402923t. Epub 2013 Sep 26.
A fast and single-step process is developed for the fabrication of low-cost, high-quality, and large-area concave microlens arrays (MLAs) by the high-speed line-scanning of femtosecond laser pulses. Each concave microlens can be generated by a single laser pulse, and over 2.78 million microlenses were fabricated on a 2 × 2 cm(2) polydimethylsiloxane (PDMS) sheet within 50 min, which greatly enhances the processing efficiency compared to the classical laser direct writing method. The mechanical pressure induced by the expansion of the laser-induced plasmas as well as a long resolidifing time is the reason for the formation of smooth concave spherical microstructures. We show that uniform microlenses with different diameters and depths can be controlled by adjusting the power of laser pulses. Their high-quality optical performance is also demonstrated in this work.
我们开发出一种快速且单步的工艺，通过飞秒激光脉冲的高速线扫描来制造低成本、高质量和大面积的凹微透镜阵列（MLAs）。每个凹微透镜都可以由单个激光脉冲产生，在 50 分钟内就在 2×2cm²的聚二甲基硅氧烷（PDMS）片上制造了超过 278 万个微透镜，与传统的激光直写方法相比，大大提高了加工效率。激光诱导等离子体膨胀产生的机械压力以及较长的再凝固时间是形成光滑凹球形微结构的原因。我们表明，通过调整激光脉冲的功率可以控制具有不同直径和深度的均匀微透镜。在这项工作中还展示了它们优异的光学性能。
