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利用注模纳米成型和多层膜光学特性实现亚波长抗反射聚合物薄膜的快速复制和轻松调制。

Rapid replication and facile modulation of subwavelength antireflective polymer film using injection nanomolding and optical property of multilayer coatings.

机构信息

Department of Mechanical Engineering, National Central University, Jhongli 32001, Taiwan.

出版信息

Nanoscale Res Lett. 2013 Oct 2;8(1):407. doi: 10.1186/1556-276X-8-407.

Abstract

A rapid, cost-effective and high-throughput process for nanotexturing subwavelength structures with high uniformity using the polycarbonate (PC) is realized via injection nanomolding. The process enables the precise control of nanohole array (NHA) surface topography (nanohole depth, diameter, and periodicity) over large areas thereby presenting a highly versatile platform for fabricating substrates with user-defined, functional performance. Specifically, the optical property of the PC substrates were systematically characterized and tuned through the modulation of the depths of NHA. The aspect ratio submicron holes can be easily modulated and experimentally proven by simply adjusting the molding temperature. The nanotextured depths were reliably fabricated in the range of 200 to 400 nm with a period of approximately 700 nm. The fabricated PC films can reduce the reflectivity from an original bare film of 10.2% and 8.9% to 1.4% and 2.1% with 400-nm depth of nanoholes at the wavelength of 400 and 550 nm, respectively. Compared with conventional moth-like nanostructures with nanopillar arrays with heights adjustable only by an etching process, this paper proposes a facile route with submicron holes to achieve a similar antireflective function, with a significantly reduced time and facile height modulation capability. Furthermore, the effects of multilayer coatings of dielectric and metallic layers on the nanomolded NHA have been performed and potential sensing application is explored.

摘要

采用聚碳酸酯(PC)通过注塑纳米成型,实现了一种快速、具有成本效益且高通量的方法,可在亚波长结构上实现高度均匀的纳米纹理化。该工艺能够精确控制纳米孔阵列(NHA)的表面形貌(纳米孔深度、直径和周期性),从而在大面积上呈现出高度通用的平台,用于制造具有用户定义功能性能的基底。具体来说,通过调制 NHA 的深度,系统地表征和调整 PC 基底的光学性质。亚微米级的深宽比孔可以通过简单地调整成型温度来轻松调节和实验验证。纳米纹理化深度可在 200nm 至 400nm 的范围内可靠地制造,周期约为 700nm。所制造的 PC 薄膜可以将原始裸膜的反射率从 10.2%和 8.9%分别降低到 400nm 和 550nm 波长下的 400nm 深纳米孔的 1.4%和 2.1%。与仅通过蚀刻工艺可调节高度的传统蛾眼状纳米结构的纳米柱阵列相比,本文提出了一种使用亚微米孔实现类似抗反射功能的简便方法,大大缩短了时间并具有易于调节高度的能力。此外,还对多层电介质和金属层的涂层对纳米模制 NHA 的影响进行了研究,并探索了潜在的传感应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ba01/3850989/d311dabae894/1556-276X-8-407-1.jpg

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