直流磁控溅射制备的ZrO₂涂层对LiCoO₂薄膜的保护作用。

Protection effect of ZrO2 coating layer on LiCoO2 thin film fabricated by DC magnetron sputtering.

作者信息

Noh Jung-Pil, Jung Ki-Taek, Jang Min-Sun, Kwon Tae-Hoon, Cho Gyu-Bong, Kim Ki-Won, Nam Tae-Hyun

机构信息

School of Materials Science and Engineering, Gyeongsang National University, 501, Jinju-daero, Jinju, Gyeongnam 660-701, Korea.

出版信息

J Nanosci Nanotechnol. 2013 Oct;13(10):7152-4. doi: 10.1166/jnn.2013.7806.

DOI:10.1166/jnn.2013.7806

PMID:24245215

Abstract

Bare and ZrO2-coated LiCoO2 thin films were fabricated by direct current magnetron sputtering method on STS304 substrates. Deposited both films have a well-crystallized structure with (003) preferred orientation after annealing at 600 degrees C. The ZrO2-coated LiCoO2 thin film provide significantly improved cycling stability compared to bare LiCoO2 thin film at high cut-off potential (3.0-4.5 V). The improvement in electrochemical stability is attributed to the structural stability by ZrO2 coating layer.

摘要

通过直流磁控溅射法在STS304衬底上制备了裸LiCoO₂薄膜和ZrO₂包覆的LiCoO₂薄膜。在600℃退火后，两种沉积薄膜均具有结晶良好的结构，且具有(003)择优取向。与裸LiCoO₂薄膜相比，ZrO₂包覆的LiCoO₂薄膜在高截止电位(3.0 - 4.5 V)下具有显著提高的循环稳定性。电化学稳定性的提高归因于ZrO₂涂层的结构稳定性。