Department of Chemistry, University of Florida, 32611, Gainesville, FL, USA.
J Am Soc Mass Spectrom. 1990 Apr;1(2):138-43. doi: 10.1016/1044-0305(90)85049-R.
A pulsed glow discharge, rather than a conventional constant dc voltage discharge, is used as an ion source for a quadrupole mass spectrometer. Both sputter yield and ion signal are enhanced by using the pulsed system because of an increase in the voltage necessary to maintain a constant average current at the cathode over the pulse period. Irregularities are seen in the pulse spectrum that appear as rapid surges in the ion signal for both sputtered and contaminant gas species. These peaks appear at the beginning of the pulse for gaseous species but are limited to the postpulse period for sputtered species. Differences in the signal forms allow for the discrimination against selected types of ion signals by using narrow data collection gates placed over different portions of the pulse period.
采用脉冲辉光放电而非传统的直流恒压放电作为四极杆质谱仪的离子源。由于在脉冲周期内维持阴极恒定平均电流所需的电压增加,溅射产额和离子信号都得到增强。在脉冲光谱中会出现不规则现象,表现为溅射和杂质气体种类的离子信号迅速增加。这些峰出现在气体种类的脉冲开始时,但仅限于溅射种类的后脉冲期间。信号形式的差异允许通过在脉冲周期的不同部分放置窄的数据采集门来对选定类型的离子信号进行区分。