Department of Electrical Engineering, the University of Texas at Dallas, 800 W. Campbell Rd., Richardson, TX 75080, USA.
Sensors (Basel). 2013 Dec 4;13(12):16672-81. doi: 10.3390/s131216672.
We report fabrication of a microneedle-based three-electrode integrated electrochemical sensor and in-vitro characterization of this sensor for glucose sensing applications. A piece of silicon was sequentially dry and wet etched to form a 15 × 15 array of tall (approximately 380 µm) sharp silicon microneedles. Iron catalyst was deposited through a SU-8 shadow mask to form the working electrode and counter electrode. A multi-walled carbon nanotube forest was grown directly on the silicon microneedle array and platinum nano-particles were electrodeposited. Silver was deposited on the Si microneedle array through another shadow mask and chlorinated to form a Ag/AgCl reference electrode. The 3-electrode electrochemical sensor was tested for various glucose concentrations in the range of 3~20 mM in 0.01 M phosphate buffered saline (PBS) solution. The sensor's amperometric response to the glucose concentration is linear and its sensitivity was found to be 17.73 ± 3 μA/mM-cm2. This microneedle-based sensor has a potential to be used for painless diabetes testing applications.
我们报告了一种基于微针的三电极集成电化学传感器的制造，并对该传感器进行了体外葡萄糖传感应用特性研究。通过对硅片进行干法和湿法刻蚀，形成了 15×15 阵列的高（约 380 µm）尖硅微针。通过 SU-8 光掩模沉积铁催化剂，形成工作电极和对电极。在硅微针阵列上直接生长多壁碳纳米管森林，并电沉积铂纳米颗粒。通过另一个光掩模在 Si 微针阵列上沉积银，并氯化形成 Ag/AgCl 参比电极。在 0.01 M 磷酸盐缓冲盐水（PBS）溶液中，对 3~20 mM 范围内的各种葡萄糖浓度对 3 电极电化学传感器进行了测试。传感器对葡萄糖浓度的安培响应呈线性，其灵敏度为 17.73 ± 3 μA/mM-cm2。这种基于微针的传感器有望用于无痛糖尿病检测应用。
