Opt Lett. 2013 Nov 15;38(22):4829-32. doi: 10.1364/OL.38.004829.
This Letter describes a universal calibration theory by which conventional interferometry can be extended to vibration robust snapshot polarization-sensitive spectral reflectometry without any complicated optical components or active devices. Experiments for verifying the proposed calibration theory have been conducted by using a Michelson-interferometer-based normal incidence spectroellipsometric system, and also some key system design considerations for object 3D pose tolerant measurement capability have been drawn. The proposed solution enables us to extract the spectroscopic ellipsometric parameter Δ(k) of an anisotropic object within 10 ms with high accuracy.
这封信件描述了一种通用校准理论，通过该理论，传统干涉测量技术可以扩展到具有振动鲁棒性的快照偏振敏感光谱反射率测量，而无需任何复杂的光学元件或有源器件。已经通过使用基于迈克尔逊干涉仪的法向入射光谱椭圆偏振测量系统进行了验证该校准理论的实验，并且还得出了一些用于实现对物体 3D 位姿容忍测量能力的关键系统设计注意事项。所提出的解决方案使我们能够在 10 毫秒内以高精度提取各向异性物体的光谱椭圆偏振参数Δ(k)。
