Department of Physics & Tsinghua-Foxconn Nanotechnology Research Center, State Key Laboratory of Low-Dimensional Quantum Physics, Tsinghua University, Beijing 100084, China.
Nanoscale Res Lett. 2014 Jan 13;9(1):25. doi: 10.1186/1556-276X-9-25.
To date, fabricating three-dimensional (3D) nanostructured substrate with small nanogap was a laborious challenge by conventional fabrication techniques. In this article, we address a simple, low-cost, large-area, and spatially controllable method to fabricate 3D nanostructures, involving hemisphere, hemiellipsoid, and pyramidal pits based on nanosphere lithography (NSL). These 3D nanostructures were used as surface-enhanced Raman scattering (SERS) substrates of single Rhodamine 6G (R6G) molecule. The average SERS enhancement factor achieved up to 1011. The inevitably negative influence of the adhesion-promoting intermediate layer of Cr or Ti was resolved by using such kind of 3D nanostructures. The nanostructured quartz substrate is a free platform as a SERS substrate and is nondestructive when altering with different metal films and is recyclable, which avoids the laborious and complicated fabricating procedures.
迄今为止，通过传统的制造技术来制造具有小纳米间隙的三维（3D）纳米结构衬底是一项艰巨的挑战。在本文中，我们提出了一种简单、低成本、大面积且空间可控的方法来制造基于纳米球光刻（NSL）的 3D 纳米结构，包括半球、半椭球和金字塔形凹坑。这些 3D 纳米结构被用作单罗丹明 6G（R6G）分子的表面增强拉曼散射（SERS）衬底。平均 SERS 增强因子高达 1011。通过使用这种 3D 纳米结构，解决了 Cr 或 Ti 的附着力促进中间层的不可避免的负面影响。这种纳米结构的石英衬底是一个自由平台，可作为 SERS 衬底，并且在改变不同的金属膜时是非破坏性的，并且是可回收的，这避免了繁琐和复杂的制造过程。
