Opt Lett. 2014 Feb 1;39(3):715-8. doi: 10.1364/OL.39.000715.
We theoretically and experimentally investigate 90° submicrometer radius bends (SRB) of metal-insulator-silicon-insulator-metal (MISIM) waveguides that are plasmonic waveguides fabricated with standard CMOS technology. We focus on the bends of MISIM waveguides with a wide (e.g., 160-220 nm) silicon line. This study shows that the bend efficiently turns the direction of the MISIM waveguide by 90° if its radius is about 0.7 μm. Moreover, we discuss the fact that the bend may be superior to a SRB of a silicon photonic waveguide when it is used to implement a ring resonator with a high quality factor and small volume.
我们从理论和实验两方面研究了亚微米半径 90°弯曲（SRB）的金属-绝缘体-硅-绝缘体-金属（MISIM）波导，该波导是采用标准 CMOS 技术制造的等离子体波导。我们重点研究了宽硅线（例如，160-220nm）的 MISIM 波导的弯曲。这项研究表明，如果半径约为 0.7μm，弯曲可以有效地将 MISIM 波导的方向转向 90°。此外，我们还讨论了这样一个事实，即当用于实现具有高品质因数和小体积的环形谐振器时，弯曲可能优于硅光子波导的 SRB。
