Seidler Paul, Lister Kevin, Drechsler Ute, Hofrichter Jens, Stöferle Thilo
Opt Express. 2013 Dec 30;21(26):32468-83. doi: 10.1364/OE.21.032468.
We describe the design, fabrication, and characterization of a 1-dimensional silicon photonic crystal cavity with a quality factor-to-mode volume ratio greater than 10(7), which exceeds the highest previous values by an order of magnitude. The maximum of the electric field is outside the silicon in a void formed by a central slot. An extremely small calculated mode volume of 0.0096 (λvac/n)(3) is achieved through the abrupt change of the electric field in the slot, despite which a high quality factor of 8.2 × 10(5) is predicted by simulation. Quality factors up to 1.4 × 10(5) are measured in actual devices. The observation of pronounced thermo-optic bistability is consistent with the strong confinement of light in these cavities.
我们描述了一种一维硅光子晶体腔的设计、制造和特性,其品质因数与模式体积之比大于10⁷,比之前的最高值高出一个数量级。电场最大值位于由中央狭缝形成的硅外的空隙中。通过狭缝中电场的突然变化,实现了极小的计算模式体积0.0096(λvac/n)³,尽管如此,模拟预测其品质因数高达8.2×10⁵。在实际器件中测得的品质因数高达1.4×10⁵。对明显的热光双稳性的观察与这些腔中光的强限制相一致。