State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences , Beijing 100083, China.
Nano Lett. 2014 Mar 12;14(3):1214-20. doi: 10.1021/nl4040847. Epub 2014 Feb 18.
Here we report the growth of phase-pure InAs nanowires on Si (111) substrates by molecular-beam epitaxy using Ag catalysts. A conventional one-step catalyst annealing process is found to give rise to InAs nanowires with diameters ranging from 4.5 to 81 nm due to the varying sizes of the Ag droplets, which reveal strong diameter dependence of the crystal structure. In contrast, a novel two-step catalyst annealing procedure yields vertical growth of highly uniform InAs nanowires ∼10 nm in diameter. Significantly, these ultrathin nanowires exhibit a perfect wurtzite crystal structure, free of stacking faults and twin defects. Using these high-quality ultrathin InAs nanowires as the channel material of metal-oxide-semiconductor field-effect transistor, we have obtained a high ION/IOFF ratio of ∼10(6), which shows great potential for application in future nanodevices with low power dissipation.
我们在此报告,通过使用 Ag 催化剂的分子束外延,在 Si(111)衬底上生长出纯相的 InAs 纳米线。由于 Ag 液滴的尺寸不同,我们发现传统的一步法催化剂退火工艺会导致直径在 4.5 到 81nm 之间的 InAs 纳米线,这表明晶体结构具有强烈的直径依赖性。相比之下,一种新颖的两步法催化剂退火程序会产生垂直生长的、高度均匀的直径约为 10nm 的 InAs 纳米线。值得注意的是,这些超薄纳米线具有完美的纤锌矿晶体结构,没有层错和孪晶缺陷。使用这些高质量的超薄 InAs 纳米线作为金属-氧化物-半导体场效应晶体管的沟道材料,我们已经获得了约 10(6)的高 ION/IOFF 比值,这表明它们在未来具有低功耗的纳米器件中有很大的应用潜力。