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无位错的硅衬底轴向 InAs/GaAs 纳米线。

Dislocation-free axial InAs-on-GaAs nanowires on silicon.

机构信息

Université Grenoble-Alpes, F-38000 Grenoble, France. CNRS-Institut Néel, 25 av. des Martyrs, F-38000 Grenoble, France.

出版信息

Nanotechnology. 2017 Sep 8;28(36):365602. doi: 10.1088/1361-6528/aa7d40. Epub 2017 Jul 3.

Abstract

We report on the growth of axial InAs-on-GaAs nanowire heterostructures on silicon by molecular beam epitaxy using 20 nm diameter Au catalysts. First, the growth parameters of the GaAs nanowire segment were optimized to achieve a pure wurtzite crystal structure. Then, we developed a two-step growth procedure to enhance the yield of vertical InAs-on-GaAs nanowires. We achieved 90% of straight InAs-on-GaAs nanowires by further optimizing the growth parameters. We investigated the composition change at the interface by energy dispersive x-ray spectroscopy and the nanowire crystal structure by transmission electron microscopy. The composition of the nominal InAs segment is found to be In Ga As with x = 0.85 and corresponds to 6% of lattice mismatch with GaAs. Strain mapping performed by the geometrical phase analysis of high-resolution images revealed a dislocation-free GaAs/InGaAs interface. In conclusion, we successfully fabricated highly mismatched heterostructures, confirming the prediction that axial GaAs/InGaAs interfaces are pseudomorphic in nanowires with a diameter smaller than 40 nm.

摘要

我们通过分子束外延法在硅衬底上生长了轴向 InAs 覆盖 GaAs 纳米线异质结构,使用的催化剂为 20nm 直径的 Au 颗粒。首先,优化了 GaAs 纳米线段的生长参数,以实现纯纤锌矿晶体结构。然后,我们开发了两步生长程序来提高垂直 InAs 覆盖 GaAs 纳米线的产率。通过进一步优化生长参数,我们实现了 90%的直 InAs 覆盖 GaAs 纳米线。通过能谱分析研究了界面处的成分变化,通过透射电子显微镜研究了纳米线的晶体结构。名义上的 InAs 段的组成被发现是 In0.85Ga0.15As,与 GaAs 的晶格失配率为 6%。通过高分辨率图像的几何相位分析进行的应变映射显示 GaAs/InGaAs 界面无位错。总之,我们成功地制造了高度失配的异质结构,证实了直径小于 40nm 的纳米线中轴向 GaAs/InGaAs 界面是伪晶的预测。

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